Description
- Input: 220 volts, 1 phase.
- Compressed air 100 psi
- Water-cooling system for difussion pump
- Min: 7 l /min water @ 25°C
- Stainless steel 304 12” diámeter, 14” height.
- Substrate: fixed, no heating, 4” diameter.
- Base pressure: atm-5.8 x 10-6 torr.
- output: 10 volts, 90 amps (for thermal evaporator)
- ultimate pressure: 7.5 x10-4 torr
- pumping system:
- Rotary vane pump E2M8 dual stage, 6 CFM.
- Diffusion pump: E04, 600 l/sec
- Dimensions: (73x148x58)
- Vacuum sensors:
- Analog pirani
- Analog penning discharge
- 1 inlet gas
- Automatic vent
- Manual shutter
- 1 vacuum interlock
- 1 ASA 4 Viewport
- USED AND TESTED
Status : Rebuilt
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