Thermal Evaporator / Glow Discharge System Model

Description

• Input: 220 volts, 1 phase.
• Compressed air 100 psi
• Water-cooling system for difussion pump
• Min: 7 l /min water @ 25°C
• Stainless steel 304 12” diámeter, 14” height.
• Substrate: fixed, no heating, 4” diameter.
• Base pressure: atm-5.8 x 10-6 torr.
• output: 10 volts, 90 amps (for thermal evaporator)
• ultimate pressure: 7.5 x10-4 torr

• pumping system:
  • Rotary vane pump E2M8 dual stage, 6 CFM.
  • Diffusion pump: E04, 600 l/sec
  • Dimensions: (73x148x58)

•  Vacuum sensors:
  • Analog pirani
  • Analog penning discharge
  • 1 inlet gas
  • Automatic vent
  • Manual shutter
  • 1 vacuum interlock
  • 1 ASA 4 Viewport
  • USED AND TESTED

Status : Rebuilt